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Layered Si–Ti oxide thin films with tailored electrical and optical properties by catalytic tandem MLD-ALD
Oxides with well-controlled optical and electrical properties are key for numerous advances in nanotechnology, including energy, catalysis, sensors, and device applications. In this study we introduce layer-by-layer deposition of silicon–titanium layered oxide (Si–Ti LO) thin films using combined ML...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2021
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9042836/ https://www.ncbi.nlm.nih.gov/pubmed/35493179 http://dx.doi.org/10.1039/d1ra06764h |