The influence of hydrogen concentration in amorphous carbon films on mechanical properties and fluorine penetration: a density functional theory and ab initio molecular dynamics study

Amorphous carbon (a-C) films have attracted significant attention due to their reliable structures and superior mechanical, chemical and electronic properties, making them a strong candidate as an etch hard mask material for the fabrication of future integrated semiconductor devices. Density functio...

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Detalles Bibliográficos
Autores principales: Park, Hwanyeol, Woo, Daekwang, Lee, Jong Myeong, Park, Se Jun, Lee, Sungwoo, Kim, Ho Jun, Yoon, Euijoon, Lee, Gun-Do
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2020
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9049780/
https://www.ncbi.nlm.nih.gov/pubmed/35493897
http://dx.doi.org/10.1039/c9ra09328a

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9049780/
https://www.ncbi.nlm.nih.gov/pubmed/35493897
http://dx.doi.org/10.1039/c9ra09328a

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