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The deposition and wet etching of Mg-doped ZnO films and their applications for solidly mounted resonators
In this report, a solidly mounted resonator (SMR), consisting of an Au electrode, Mg-doped ZnO (Mg(X)Zn(1−X)O) piezoelectric film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) magnetron sputtering. As a key processing step for the SMR, Mg(X)Zn(1−X)O films wit...
| Autores principales: | , , , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2020
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9050162/ https://www.ncbi.nlm.nih.gov/pubmed/35497202 http://dx.doi.org/10.1039/d0ra00659a |