Stability studies of ZnO and AlN thin film acoustic wave devices in acid and alkali harsh environments

Surface acoustic wave (SAW) devices based on piezoelectric thin-films such as ZnO and AlN are widely used in sensing, microfluidics and lab-on-a-chip applications. However, for many of these applications, the SAW devices will inevitably be used in acid or alkali harsh environments, which may cause t...

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Detalles Bibliográficos
Autores principales: Xiong, Shuo, Liu, Xudong, Zhou, Jian, Liu, Yi, Shen, Yiping, Yin, Xiaobo, Wu, Jianhui, Tao, Ran, Fu, Yongqing, Duan, Huigao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2020
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9054069/
https://www.ncbi.nlm.nih.gov/pubmed/35515426
http://dx.doi.org/10.1039/d0ra02448a

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9054069/
https://www.ncbi.nlm.nih.gov/pubmed/35515426
http://dx.doi.org/10.1039/d0ra02448a

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