Phase identification of vanadium oxide thin films prepared by atomic layer deposition using X-ray absorption spectroscopy

The chemical and local structures of vanadium oxide (VO(x)) thin films prepared by atomic layer deposition (ALD) were investigated by soft X-ray absorption spectroscopy. It is shown that the as-deposited film was a mixture of VO(2) and V(2)O(5) in disordered form, while the chemistry changed signifi...

Descripción completa

Detalles Bibliográficos
Autores principales: Kim, Yejin, Song, Gwang Yeom, Nandi, Raju, Cho, Jae Yu, Heo, Jaeyeong, Cho, Deok-Yong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2020
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9055385/
https://www.ncbi.nlm.nih.gov/pubmed/35519762
http://dx.doi.org/10.1039/d0ra04384b

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9055385/
https://www.ncbi.nlm.nih.gov/pubmed/35519762
http://dx.doi.org/10.1039/d0ra04384b

Ejemplares similares