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Phase identification of vanadium oxide thin films prepared by atomic layer deposition using X-ray absorption spectroscopy

The chemical and local structures of vanadium oxide (VO(x)) thin films prepared by atomic layer deposition (ALD) were investigated by soft X-ray absorption spectroscopy. It is shown that the as-deposited film was a mixture of VO(2) and V(2)O(5) in disordered form, while the chemistry changed signifi...

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Detalles Bibliográficos
Autores principales:	Kim, Yejin, Song, Gwang Yeom, Nandi, Raju, Cho, Jae Yu, Heo, Jaeyeong, Cho, Deok-Yong
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2020
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9055385/ https://www.ncbi.nlm.nih.gov/pubmed/35519762 http://dx.doi.org/10.1039/d0ra04384b

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