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Spatial zigzag evolution of cracks in moving sapphire initiated by bursts of picosecond laser pulses for ultrafast wafer dicing
Spatial zigzag evolution of cracks in moving sapphire wafer was observed after irradiation with sequences of picosecond laser pulses (bursts). The Gaussian beam was tightly focused inside the sapphire. The spatial position of laser initiated cracks moved in vertical and horizontal directions when a...
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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The Royal Society of Chemistry
2020
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9056679/ https://www.ncbi.nlm.nih.gov/pubmed/35515025 http://dx.doi.org/10.1039/d0ra06791a |