PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography

Empty space in germanium (ESG) or germanium-on-nothing (GON) are unique self-assembled germanium structures with multiscale cavities of various morphologies. Due to their simple fabrication process and high-quality crystallinity after self-assembly, they can be applied in various fields including mi...

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Detalles Bibliográficos
Autores principales: Jeong, Jaewoo, Kim, Taeyeong, Lee, Bong Jae, Lee, Jungchul
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9065006/
https://www.ncbi.nlm.nih.gov/pubmed/35504973
http://dx.doi.org/10.1038/s41598-022-11185-w

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9065006/
https://www.ncbi.nlm.nih.gov/pubmed/35504973
http://dx.doi.org/10.1038/s41598-022-11185-w

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