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PCA-based sub-surface structure and defect analysis for germanium-on-nothing using nanoscale surface topography
Empty space in germanium (ESG) or germanium-on-nothing (GON) are unique self-assembled germanium structures with multiscale cavities of various morphologies. Due to their simple fabrication process and high-quality crystallinity after self-assembly, they can be applied in various fields including mi...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
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Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9065006/ https://www.ncbi.nlm.nih.gov/pubmed/35504973 http://dx.doi.org/10.1038/s41598-022-11185-w |