Solidly mounted resonator sensor for biomolecule detections

We report the fabrication of a solidly mounted resonator (SMR) that can also function as a sensor for biological molecules. The SMR, consisting of a Au electrode, aluminum nitride (AlN) piezoelectric thin film and Bragg acoustic reflector, was fabricated on a Si substrate by radio frequency (RF) mag...

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Detalles Bibliográficos
Autores principales: Han, Chengzhang, Wang, Xia, Zhao, Qiuling, Teng, Lihua, Zhang, Shuaiyi, Lv, Hao, Liu, Jing, Ma, Haoran, Wang, Yanping
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2019
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9065989/
https://www.ncbi.nlm.nih.gov/pubmed/35521317
http://dx.doi.org/10.1039/c9ra01695c

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9065989/
https://www.ncbi.nlm.nih.gov/pubmed/35521317
http://dx.doi.org/10.1039/c9ra01695c

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