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A hybrid YSZ/SnO(2)/MEMS SO(2) gas sensor
This study uses a solid YSZ electrolyte film in a SnO(2) MEMS SO(2) gas sensor of the semiconductor type to enhance the redox reaction. The YSZ film is prepared by RF sputtering. XRD analysis shows the presence of the (111), (200), (220) and (311) peaks that denote the crystallization planes of YSZ....
| Autores principales: | , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2019
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9070785/ https://www.ncbi.nlm.nih.gov/pubmed/35530490 http://dx.doi.org/10.1039/c9ra03607e |