A hybrid YSZ/SnO(2)/MEMS SO(2) gas sensor

This study uses a solid YSZ electrolyte film in a SnO(2) MEMS SO(2) gas sensor of the semiconductor type to enhance the redox reaction. The YSZ film is prepared by RF sputtering. XRD analysis shows the presence of the (111), (200), (220) and (311) peaks that denote the crystallization planes of YSZ. The experimental results show that the SnO(2) MEMS SO(2) gas sensor with a YSZ film has a better sensor response than a pure SnO(2) MEMS SO(2) gas sensor or a YSZ MEMS SO(2) gas sensor when the SO(2) concentration and the sensor's temperature sensors are 250 ppb and 400 °C, respectively. The YSZ/SnO(2) sensor's measured responses are around 6%, 45%, 20% and 16% when the sensor is respectively operated at 250 °C, 300 °C, 350 °C, and 400 °C.