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A hybrid YSZ/SnO(2)/MEMS SO(2) gas sensor

This study uses a solid YSZ electrolyte film in a SnO(2) MEMS SO(2) gas sensor of the semiconductor type to enhance the redox reaction. The YSZ film is prepared by RF sputtering. XRD analysis shows the presence of the (111), (200), (220) and (311) peaks that denote the crystallization planes of YSZ....

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Detalles Bibliográficos
Autores principales:	Hsueh, Ting-Jen, Lu, Chun-Liang
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	The Royal Society of Chemistry 2019
Materias:	Chemistry
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9070785/ https://www.ncbi.nlm.nih.gov/pubmed/35530490 http://dx.doi.org/10.1039/c9ra03607e

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