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Dielectric ceramics/TiO(2)/single-crystalline silicon nanomembrane heterostructure for high performance flexible thin-film transistors on plastic substrates
A dielectric ceramics/TiO(2)/single-crystalline silicon nanomembrane (SiNM) heterostructure is designed and fabricated for high performance flexible thin-film transistors (TFTs). Both the dielectric ceramics (Nb(2)O(3)–Bi(2)O(3)–MgO) and TiO(2) are deposited by radio frequency (RF) magnetron sputter...
Autores principales: | , , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2019
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9074119/ https://www.ncbi.nlm.nih.gov/pubmed/35530705 http://dx.doi.org/10.1039/c9ra06572e |