Dielectric ceramics/TiO(2)/single-crystalline silicon nanomembrane heterostructure for high performance flexible thin-film transistors on plastic substrates

A dielectric ceramics/TiO(2)/single-crystalline silicon nanomembrane (SiNM) heterostructure is designed and fabricated for high performance flexible thin-film transistors (TFTs). Both the dielectric ceramics (Nb(2)O(3)–Bi(2)O(3)–MgO) and TiO(2) are deposited by radio frequency (RF) magnetron sputter...

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Detalles Bibliográficos
Autores principales: Qin, Guoxuan, Pei, Zhihui, Zhang, Yibo, Lan, Kuibo, Li, Quanning, Li, Lingxia, Yu, Shihui, Chen, Xuejiao
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2019
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9074119/
https://www.ncbi.nlm.nih.gov/pubmed/35530705
http://dx.doi.org/10.1039/c9ra06572e

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