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Nanolithography using thermal stresses
Nanometer separation (nanogap) in electrodes is a fundamental requirement for several nanoscale devices having applications in nanoelectronics, nanophotonics, biosensing, nanoporous filters, healthcare and medical diagnostics. Most nanolithography techniques, other than extreme/deep ultraviolet lith...
| Autores principales: | , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9077770/ https://www.ncbi.nlm.nih.gov/pubmed/35539559 http://dx.doi.org/10.1039/c8ra00278a |