Influence of substrate on the structure of predominantly anatase TiO(2) films grown by reactive sputtering

TiO(2) films are grown on LaAlO(3) (001), Si (100) and SiO(2) substrates by reactive radio frequency sputtering. X-ray diffraction (XRD) pole figures revealed important characteristics about the texture and phase distribution on those films. Combined with spectroscopic ellipsometry, the pole figures...

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Detalles Bibliográficos
Autores principales: Brandt, Iuri S., Plá Cid, Cristiani C., Azevedo, Carlos G. G., Pereira, André L. J., Benetti, Luana C., Ferlauto, Andre S., Dias da Silva, José H., Pasa, André A.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9078418/
https://www.ncbi.nlm.nih.gov/pubmed/35540366
http://dx.doi.org/10.1039/c7ra10974a

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9078418/
https://www.ncbi.nlm.nih.gov/pubmed/35540366
http://dx.doi.org/10.1039/c7ra10974a

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