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Bridged oxide nanowire device fabrication using single step metal catalyst free thermal evaporation

In this study, indium-tin-zinc-oxide (ITZO) and Zn doped In(2)O(3) nanowires were directly grown as bridged nanowires between two heavily doped silicon (Si) electrodes on an SOI wafer using single step vapor–solid–solid (VSS) growth method. SEM analysis showed highly dense and self aligned nanowire...

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Detalles Bibliográficos
Autores principales: Coşkun, Mustafa, Ombaba, Matthew M., Dumludağ, Fatih, Altındal, Ahmet, Islam, M. Saif
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9078917/
https://www.ncbi.nlm.nih.gov/pubmed/35540462
http://dx.doi.org/10.1039/c7ra11987a