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Bridged oxide nanowire device fabrication using single step metal catalyst free thermal evaporation
In this study, indium-tin-zinc-oxide (ITZO) and Zn doped In(2)O(3) nanowires were directly grown as bridged nanowires between two heavily doped silicon (Si) electrodes on an SOI wafer using single step vapor–solid–solid (VSS) growth method. SEM analysis showed highly dense and self aligned nanowire...
| Autores principales: | , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
The Royal Society of Chemistry
2018
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9078917/ https://www.ncbi.nlm.nih.gov/pubmed/35540462 http://dx.doi.org/10.1039/c7ra11987a |