Single-shot femtosecond bulk micromachining of silicon with mid-IR tightly focused beams

Being the second most abundant element on earth after oxygen, silicon remains the working horse for key technologies for the years. Novel photonics platform for high-speed data transfer and optical memory demands higher flexibility of the silicon modification, including on-chip and in-bulk inscripti...

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Detalles Bibliográficos
Autores principales: Mareev, Evgenii, Pushkin, Andrey, Migal, Ekaterina, Lvov, Kirill, Stremoukhov, Sergey, Potemkin, Fedor
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9079093/
https://www.ncbi.nlm.nih.gov/pubmed/35525844
http://dx.doi.org/10.1038/s41598-022-11501-4

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9079093/
https://www.ncbi.nlm.nih.gov/pubmed/35525844
http://dx.doi.org/10.1038/s41598-022-11501-4

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