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Single-shot femtosecond bulk micromachining of silicon with mid-IR tightly focused beams
Being the second most abundant element on earth after oxygen, silicon remains the working horse for key technologies for the years. Novel photonics platform for high-speed data transfer and optical memory demands higher flexibility of the silicon modification, including on-chip and in-bulk inscripti...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
Nature Publishing Group UK
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9079093/ https://www.ncbi.nlm.nih.gov/pubmed/35525844 http://dx.doi.org/10.1038/s41598-022-11501-4 |