Mechanisms for low-temperature direct bonding of Si/Si and quartz/quartz via VUV/O(3) activation

Direct bonding is an attractive technique for joining two mirror polished surfaces without any intermediate materials. Vacuum ultraviolet (VUV) irradiation is an effective way for cleaning surfaces as well as increasing hydrophilicity with less surface damage. However, its applications for the direc...

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Detalles Bibliográficos
Autores principales: Xu, Jikai, Wang, Chenxi, Wang, Te, Wang, Yuan, Kang, Qiushi, Liu, Yannan, Tian, Yanhong
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9079126/
https://www.ncbi.nlm.nih.gov/pubmed/35542819
http://dx.doi.org/10.1039/c7ra13095c

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9079126/
https://www.ncbi.nlm.nih.gov/pubmed/35542819
http://dx.doi.org/10.1039/c7ra13095c

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