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Reaction control of metal-assisted chemical etching for silicon-based zone plate nanostructures
Metal-assisted chemical etching (MACE) reaction parameters were investigated for the fabrication of specially designed silicon-based X-ray zone plate nanostructures using a gold catalyst pattern and etching solutions composed of HF and H(2)O(2). Etching depth, zone verticality and zone roughness wer...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
The Royal Society of Chemistry
2018
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9079411/ https://www.ncbi.nlm.nih.gov/pubmed/35541233 http://dx.doi.org/10.1039/c8ra01627e |