Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

Correction for ‘EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer’ by Cleverson Alves da Silva Moura et al., RSC Adv., 2018, 8, 10930–10938.

Detalles Bibliográficos
Autores principales: Moura, Cleverson Alves da Silva, Belmonte, Guilherme Kretzmann, Reddy, Pulikanti Guruprasad, Gonsalves, Kenneth E., Weibel, Daniel Eduardo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9080001/
https://www.ncbi.nlm.nih.gov/pubmed/35544017
http://dx.doi.org/10.1039/c8ra90030b

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9080001/
https://www.ncbi.nlm.nih.gov/pubmed/35544017
http://dx.doi.org/10.1039/c8ra90030b

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