Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

Correction for ‘EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer’ by Cleverson Alves da Silva Moura et al., RSC Adv., 2018, 8, 10930–10938.

Detalles Bibliográficos
Autores principales: Moura, Cleverson Alves da Silva, Belmonte, Guilherme Kretzmann, Reddy, Pulikanti Guruprasad, Gonsalves, Kenneth E., Weibel, Daniel Eduardo
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9080001/
https://www.ncbi.nlm.nih.gov/pubmed/35544017
http://dx.doi.org/10.1039/c8ra90030b
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author Moura, Cleverson Alves da Silva
Belmonte, Guilherme Kretzmann
Reddy, Pulikanti Guruprasad
Gonsalves, Kenneth E.
Weibel, Daniel Eduardo
author_facet Moura, Cleverson Alves da Silva
Belmonte, Guilherme Kretzmann
Reddy, Pulikanti Guruprasad
Gonsalves, Kenneth E.
Weibel, Daniel Eduardo
author_sort Moura, Cleverson Alves da Silva
collection PubMed
description Correction for ‘EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer’ by Cleverson Alves da Silva Moura et al., RSC Adv., 2018, 8, 10930–10938.
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spelling pubmed-90800012022-05-09 Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer Moura, Cleverson Alves da Silva Belmonte, Guilherme Kretzmann Reddy, Pulikanti Guruprasad Gonsalves, Kenneth E. Weibel, Daniel Eduardo RSC Adv Chemistry Correction for ‘EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer’ by Cleverson Alves da Silva Moura et al., RSC Adv., 2018, 8, 10930–10938. The Royal Society of Chemistry 2018-04-20 /pmc/articles/PMC9080001/ /pubmed/35544017 http://dx.doi.org/10.1039/c8ra90030b Text en This journal is © The Royal Society of Chemistry https://creativecommons.org/licenses/by/3.0/
spellingShingle Chemistry
Moura, Cleverson Alves da Silva
Belmonte, Guilherme Kretzmann
Reddy, Pulikanti Guruprasad
Gonsalves, Kenneth E.
Weibel, Daniel Eduardo
Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
title Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
title_full Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
title_fullStr Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
title_full_unstemmed Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
title_short Correction: EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
title_sort correction: euv photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer
topic Chemistry
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9080001/
https://www.ncbi.nlm.nih.gov/pubmed/35544017
http://dx.doi.org/10.1039/c8ra90030b
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