Traceless mitigation of laser damage precursors on a fused silica surface by combining reactive ion beam etching with dynamic chemical etching

HF-based etching has been successful in mitigating damage precursors on the surface of fused silica optics used in high power lasers. However, wet etching generally leaves an etching trace leading to surface roughness, which seriously degrades laser beam quality (e.g., transmission loss and wave-fro...

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Detalles Bibliográficos
Autores principales: Sun, Laixi, Shao, Ting, Xu, Jianfeng, Zhou, Xiangdong, Ye, Xin, Huang, Jin, Bai, Jian, Jiang, Xiaodong, Zheng, Wanguo, Yang, Liming
Formato: Online Artículo Texto
Lenguaje:English
Publicado: The Royal Society of Chemistry 2018
Materias:
Chemistry
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9086277/
https://www.ncbi.nlm.nih.gov/pubmed/35547680
http://dx.doi.org/10.1039/c8ra06759g

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9086277/
https://www.ncbi.nlm.nih.gov/pubmed/35547680
http://dx.doi.org/10.1039/c8ra06759g

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