Reduction of parasitic reaction in high-temperature AlN growth by jet stream gas flow metal–organic vapor phase epitaxy

AlGaN-based deep ultraviolet light-emitting diodes (LEDs) have a wide range of applications such as medical diagnostics, gas sensing, and water sterilization. Metal–organic vapor phase epitaxy (MOVPE) method is used for the growth of all-in-one structures, including doped layer and thin multilayers,...

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Detalles Bibliográficos
Autores principales: Nagamatsu, Kentaro, Tsuda, Shota, Miyagawa, Takumi, Aono, Reiya, Hirayama, Hideki, Takashima, Yuusuke, Naoi, Yoshiki
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Nature Publishing Group UK 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9088723/
https://www.ncbi.nlm.nih.gov/pubmed/35538125
http://dx.doi.org/10.1038/s41598-022-10937-y

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9088723/
https://www.ncbi.nlm.nih.gov/pubmed/35538125
http://dx.doi.org/10.1038/s41598-022-10937-y

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