Deep-Learning-Assisted Focused Ion Beam Nanofabrication

[Image: see text] Focused ion beam (FIB) milling is an important rapid prototyping tool for micro- and nanofabrication and device and materials characterization. It allows for the manufacturing of arbitrary structures in a wide variety of materials, but establishing the process parameters for a give...

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Detalles Bibliográficos
Autores principales: Buchnev, Oleksandr, Grant-Jacob, James A., Eason, Robert W., Zheludev, Nikolay I., Mills, Ben, MacDonald, Kevin F.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: American Chemical Society 2022
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9097578/
https://www.ncbi.nlm.nih.gov/pubmed/35324209
http://dx.doi.org/10.1021/acs.nanolett.1c04604

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9097578/
https://www.ncbi.nlm.nih.gov/pubmed/35324209
http://dx.doi.org/10.1021/acs.nanolett.1c04604

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