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Deep-Learning-Assisted Focused Ion Beam Nanofabrication
[Image: see text] Focused ion beam (FIB) milling is an important rapid prototyping tool for micro- and nanofabrication and device and materials characterization. It allows for the manufacturing of arbitrary structures in a wide variety of materials, but establishing the process parameters for a give...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
American Chemical Society
2022
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| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9097578/ https://www.ncbi.nlm.nih.gov/pubmed/35324209 http://dx.doi.org/10.1021/acs.nanolett.1c04604 |