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Radiation-Induced Nucleation and Growth of CaSi(2) Crystals, Both Directly during the Epitaxial CaF(2) Growth and after the CaF(2) Film Formation
The radiation-induced phenomena of CaSi(2) crystal growth were investigated, both directly during the epitaxial CaF(2) growth on Si (111) and film irradiation with fast electrons on Si (111) after its formation, while maintaining the specified film thickness, substrate temperature and radiation dose...
Autores principales: | , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9103316/ https://www.ncbi.nlm.nih.gov/pubmed/35564116 http://dx.doi.org/10.3390/nano12091407 |