Cargando…

Argon Ion Beam Current Dependence of Si-Si Surface Activated Bonding

In order to optimize the process parameters of Si-Si wafer direct bonding at room temperature, Si-Si surface activated bonding (SAB) was performed, and the effect of the argon ion beam current for surface activation treatment on the Si-Si bonding quality was investigated. For the surface activation...

Descripción completa

Detalles Bibliográficos
Autores principales:	Yang, Song, Deng, Ningkang, Qu, Yongfeng, Wang, Kang, Yuan, Yuan, Hu, Wenbo, Wu, Shengli, Wang, Hongxing
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9105243/ https://www.ncbi.nlm.nih.gov/pubmed/35591449 http://dx.doi.org/10.3390/ma15093115

Ejemplares similares

Electrical and Thermal Characteristics of AlGaN/GaN HEMT Devices with Dual Metal Gate Structure: A Theoretical Investigation
por: Qu, Yongfeng, et al.
Publicado: (2022)

Spontaneous S–Si bonding of alkanethiols to Si(111)–H: towards Si–molecule–Si circuits
por: Peiris, Chandramalika R., et al.
Publicado: (2020)

The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates
por: Nikolaev, Ivan V., et al.
Publicado: (2022)

Mechanisms for low-temperature direct bonding of Si/Si and quartz/quartz via VUV/O(3) activation
por: Xu, Jikai, et al.
Publicado: (2018)

π-Electron systems containing Si=Si double bonds
por: Matsuo, Tsukasa, et al.
Publicado: (2018)

Comparative Study on the Surface Remelting of Mo-Si-B Alloys with Laser and Electron Beam
por: Li, Qiuliang, et al.
Publicado: (2022)

Arrays of Si vacancies in 4H-SiC produced by focused Li ion beam implantation
por: Pavunny, Shojan P., et al.
Publicado: (2021)

Ion-Beam Synthesis of Gallium Oxide Nanocrystals in a SiO(2)/Si Dielectric Matrix
por: Korolev, Dmitry S., et al.
Publicado: (2022)

Sputtering of silicon nanopowders by an argon cluster ion beam
por: Zeng, Xiaomei, et al.
Publicado: (2019)

Ion-Beam-Induced Atomic Mixing in Ge, Si, and SiGe, Studied by Means of Isotope Multilayer Structures
por: Radek, Manuel, et al.
Publicado: (2017)

Direct Synthesis of Large-Scale Multilayer TaSe(2) on SiO(2)/Si Using Ion Beam Technology
por: Tsai, Hsu-Sheng, et al.
Publicado: (2019)

Li on bond-center sites in Si
por: Wahl, U, et al.
Publicado: (1994)

Fabrication of Si Micropore and Graphene Nanohole Structures by Focused Ion Beam
por: Md Ibrahim, Nik Noor Nabilah, et al.
Publicado: (2020)

Tracing the Si Dangling Bond Nanopathway Evolution ina-SiN(x):H Resistive Switching Memory by the Transient Current
por: Chen, Tong, et al.
Publicado: (2022)

A Feasible Strategy for Fabricating Surface Porous Network in Fe-Si Ribbons
por: Wang, Shuai, et al.
Publicado: (2018)

Experimental Study on Shear Rheological Polishing of Si Surface of 4H-SiC Wafer
por: Li, Peng, et al.
Publicado: (2023)

Temperature dependent photoelectron diffraction of the Si(001) surface
por: Fraxedas, J, et al.
Publicado: (1994)

Mechanism of the cooperative Si–H bond activation at Ru–S bonds
por: Stahl, Timo, et al.
Publicado: (2015)

Generation of pyridyl coordinated organosilicon cation pool by oxidative Si-Si bond dissociation
por: Nokami, Toshiki, et al.
Publicado: (2007)

Spirocyclic germanes via transannular insertion reactions of vinyl germylenes into Si–Si bonds
por: Walewska, Małgorzata, et al.
Publicado: (2018)

Iron(II)-Catalyzed Activation of Si–N and Si–O Bonds Using Hydroboranes
por: Farcaş-Johnson, Mirela A., et al.
Publicado: (2023)

Site-controlled formation of single Si nanocrystals in a buried SiO(2) matrix using ion beam mixing
por: Xu, Xiaomo, et al.
Publicado: (2018)

Pomegranate-Like Structured Si@SiO(x) Composites With High-Capacity for Lithium-Ion Batteries
por: Li, Jianbin, et al.
Publicado: (2020)

Characterization of SiPM arrays with common bias and common readout for applications in liquid argon
por: Babicz, Marta, et al.
Publicado: (2019)

Ion-Induced Nanoscale Ripple Patterns on Si Surfaces: Theory and Experiment
por: Keller, Adrian, et al.
Publicado: (2010)

A Stable Core–Shell Si@SiO(x)/C Anode Produced via the Spray and Pyrolysis Method for Lithium-Ion Batteries
por: Li, Xuelei, et al.
Publicado: (2022)

Current Transport Mechanism for Heavy-Ion Degraded SiC MOSFETs
por: Martinella, C, et al.
Publicado: (2019)

Effects of Si/C Ratio on the Phase Composition of Si-C-N Powders Synthesized by Carbonitriding
por: Zhang, Cong, et al.
Publicado: (2020)

The Current SI Seen From the Perspective of the Proposed New SI
por: Taylor, Barry N.
Publicado: (2011)

Effect of Si(111) Surface Modification by Ga Focused Ion Beam at 30 kV on GaAs Nanowire Growth
por: Shandyba, Nikita, et al.
Publicado: (2022)

Wafer Bonding of SiC-AlN at Room Temperature for All-SiC Capacitive Pressure Sensor
por: Mu, Fengwen, et al.
Publicado: (2019)

SiC/MoSi(2)-SiC-Si Oxidation Protective Coatings for HTR Graphite Spheres with Residual Si Optimized
por: Wei, Xiaoyu, et al.
Publicado: (2022)

$^{31}$Si self-diffusion in Si-Ge alloys and Si-(B-)C-N ceramics and diffusion studies for Al and Si beam developments
por: Strohm, A, et al.
Publicado: (2001)

Bias-polarity-dependent resistance switching in W/SiO(2)/Pt and W/SiO(2)/Si/Pt structures
por: Jiang, Hao, et al.
Publicado: (2016)

Strong Surface Orientation Dependent Thermal Transport in Si Nanowires
por: Zhou, Yanguang, et al.
Publicado: (2016)

Mechanochemical synthesis of Si/Cu(3)Si-based composite as negative electrode materials for lithium ion battery
por: Hou, Shang-Chieh, et al.
Publicado: (2018)

Dual beam organic depth profiling using large argon cluster ion beams
por: Holzweber, M, et al.
Publicado: (2014)

High performance surface-enhanced Raman scattering substrates of Si-based Au film developed by focused ion beam nanofabrication
por: Gao, Tingting, et al.
Publicado: (2012)

Formation of Ge-Sn nanodots on Si(100) surfaces by molecular beam epitaxy
por: Mashanov, Vladimir, et al.
Publicado: (2011)

Fabrication of Si/graphene/Si Double Heterostructures by Semiconductor Wafer Bonding towards Future Applications in Optoelectronics
por: Naito, Takenori, et al.
Publicado: (2018)

Cannot write session to /tmp/vufind_sessions/sess_5507u0vokerq4u3u24g5eaj4m7