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Low-cost, open-source XYZ nanopositioner for high-precision analytical applications

Nanoscale positioning has numerous applications in both academia and industry. A growing number of applications require devices with long working distances and nanoscale resolutions. Friction–inertia piezoelectric positioners, which are based on the stick–slip mechanism, achieve both nanometer resol...

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Detalles Bibliográficos
Autores principales: Liao, Hsien-Shun, Werner, Christian, Slipets, Roman, Emil Larsen, Peter, Hwang, Ing-Shouh, Chang, Tien-Jen, Ulrich Danzebrink, Hans, Huang, Kuang-Yuh, Hwu, En-Te
Formato: Online Artículo Texto
Lenguaje:English
Publicado: Elsevier 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9133644/
https://www.ncbi.nlm.nih.gov/pubmed/35647417
http://dx.doi.org/10.1016/j.ohx.2022.e00317