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Low-cost, open-source XYZ nanopositioner for high-precision analytical applications
Nanoscale positioning has numerous applications in both academia and industry. A growing number of applications require devices with long working distances and nanoscale resolutions. Friction–inertia piezoelectric positioners, which are based on the stick–slip mechanism, achieve both nanometer resol...
Autores principales: | Liao, Hsien-Shun, Werner, Christian, Slipets, Roman, Emil Larsen, Peter, Hwang, Ing-Shouh, Chang, Tien-Jen, Ulrich Danzebrink, Hans, Huang, Kuang-Yuh, Hwu, En-Te |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
Elsevier
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9133644/ https://www.ncbi.nlm.nih.gov/pubmed/35647417 http://dx.doi.org/10.1016/j.ohx.2022.e00317 |
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