Polyimide-Based High-Performance Film Bulk Acoustic Resonator Humidity Sensor and Its Application in Real-Time Human Respiration Monitoring

Respiration monitoring is vital for human health assessment. Humidity sensing is a promising way to establish a relationship between human respiration and electrical signal. This paper presents a polyimide-based film bulk acoustic resonator (PI-FBAR) humidity sensor operating in resonant frequency a...

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Detalles Bibliográficos
Autores principales: Zhu, Yusi, Xia, Pan, Liu, Jihang, Fang, Zhen, Du, Lidong, Zhao, Zhan
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9143046/
https://www.ncbi.nlm.nih.gov/pubmed/35630225
http://dx.doi.org/10.3390/mi13050758

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9143046/
https://www.ncbi.nlm.nih.gov/pubmed/35630225
http://dx.doi.org/10.3390/mi13050758

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