Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS

Monolithic integration of permanent micromagnets into MEMS structures offers many advantages in magnetic MEMS applications. A novel technique called PowderMEMS, based on the agglomeration of micron-sized powders by atomic layer deposition (ALD), has been used to fabricate permanent micromagnets on 8...

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Detalles Bibliográficos
Autores principales: Bodduluri, Mani Teja, Gojdka, Björn, Wolff, Niklas, Kienle, Lorenz, Lisec, Thomas, Lofink, Fabian
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9143539/
https://www.ncbi.nlm.nih.gov/pubmed/35630209
http://dx.doi.org/10.3390/mi13050742

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9143539/
https://www.ncbi.nlm.nih.gov/pubmed/35630209
http://dx.doi.org/10.3390/mi13050742

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