Ultra-Low-Voltage Capacitive Micromachined Ultrasonic Transducers with Increased Output Pressure Due to Piston-Structured Plates

Capacitive micromachined ultrasonic transducers (CMUTs) represent an accepted technology for ultrasonic transducers, while high bias voltage requirements and limited output pressure still need to be addressed. In this paper, we present a design for ultra-low-voltage operation with enhanced output pr...

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Detalles Bibliográficos
Autores principales: Merbeler, Fabian, Wismath, Sonja, Haubold, Marco, Bretthauer, Christian, Kupnik, Mario
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144194/
https://www.ncbi.nlm.nih.gov/pubmed/35630143
http://dx.doi.org/10.3390/mi13050676

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144194/
https://www.ncbi.nlm.nih.gov/pubmed/35630143
http://dx.doi.org/10.3390/mi13050676

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