Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations

MEMS actuators rely on the deformation of silicon structures. Using dimensions smaller than dozens of micrometers reveals that the micro-electro-mechanical systems (MEMS) actuators are affected by fabrication inaccuracies, leading to hardly predictable forces and/or actuation results. In this paper,...

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Detalles Bibliográficos
Autores principales: Shi, Zhichao, Martincic, Emile, Moulin, Johan, Lefeuvre, Elie, Lamarque, Frédéric
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144275/
https://www.ncbi.nlm.nih.gov/pubmed/35630121
http://dx.doi.org/10.3390/mi13050654

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144275/
https://www.ncbi.nlm.nih.gov/pubmed/35630121
http://dx.doi.org/10.3390/mi13050654

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