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Case Study of a MEMS Snap-Through Actuator: Modeling and Fabrication Considerations
MEMS actuators rely on the deformation of silicon structures. Using dimensions smaller than dozens of micrometers reveals that the micro-electro-mechanical systems (MEMS) actuators are affected by fabrication inaccuracies, leading to hardly predictable forces and/or actuation results. In this paper,...
Autores principales: | Shi, Zhichao, Martincic, Emile, Moulin, Johan, Lefeuvre, Elie, Lamarque, Frédéric |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144275/ https://www.ncbi.nlm.nih.gov/pubmed/35630121 http://dx.doi.org/10.3390/mi13050654 |
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