The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes

In this paper, we develop a new approach in order to understand the origin of the quadrature error in MEMS gyroscopes. As the width of the flexure springs is a critical parameter in the MEMS design, it is necessary to investigate the impact of the width variations on the stiffness coupling, which ca...

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Detalles Bibliográficos
Autores principales: Azier, Alexandre, Kacem, Najib, Chaumet, Bernard, Bouhaddi, Noureddine
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144994/
https://www.ncbi.nlm.nih.gov/pubmed/35630122
http://dx.doi.org/10.3390/mi13050655

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144994/
https://www.ncbi.nlm.nih.gov/pubmed/35630122
http://dx.doi.org/10.3390/mi13050655

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