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The Effect of the Bending Beam Width Variations on the Discrepancy of the Resulting Quadrature Errors in MEMS Gyroscopes
In this paper, we develop a new approach in order to understand the origin of the quadrature error in MEMS gyroscopes. As the width of the flexure springs is a critical parameter in the MEMS design, it is necessary to investigate the impact of the width variations on the stiffness coupling, which ca...
| Autores principales: | , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9144994/ https://www.ncbi.nlm.nih.gov/pubmed/35630122 http://dx.doi.org/10.3390/mi13050655 |