A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-finenes...

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Detalles Bibliográficos
Autores principales: Wang, Suwei, Wang, Jun, Li, Wenhao, Liu, Yangyang, Li, Jiashun, Jia, Pinggang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145377/
https://www.ncbi.nlm.nih.gov/pubmed/35630230
http://dx.doi.org/10.3390/mi13050763

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145377/
https://www.ncbi.nlm.nih.gov/pubmed/35630230
http://dx.doi.org/10.3390/mi13050763

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