A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application

In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-finenes...

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Autores principales: Wang, Suwei, Wang, Jun, Li, Wenhao, Liu, Yangyang, Li, Jiashun, Jia, Pinggang
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145377/
https://www.ncbi.nlm.nih.gov/pubmed/35630230
http://dx.doi.org/10.3390/mi13050763
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author Wang, Suwei
Wang, Jun
Li, Wenhao
Liu, Yangyang
Li, Jiashun
Jia, Pinggang
author_facet Wang, Suwei
Wang, Jun
Li, Wenhao
Liu, Yangyang
Li, Jiashun
Jia, Pinggang
author_sort Wang, Suwei
collection PubMed
description In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/°C at 25~300 °C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing.
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spelling pubmed-91453772022-05-29 A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application Wang, Suwei Wang, Jun Li, Wenhao Liu, Yangyang Li, Jiashun Jia, Pinggang Micromachines (Basel) Article In this paper, a high-fineness fiber-optic Fabry–Perot high-temperature pressure sensor, based on MEMS technology, is proposed and experimentally verified. The Faber–Perot cavity of the pressure sensor is formed by the anodic bonding of a sensitive silicon diaphragm and a Pyrex glass; a high-fineness interference signal is obtained by coating the interface surface with a high-reflection film, so as to simplify the signal demodulation system. The experimental results show that the pressure sensitivity of this sensor is 55.468 nm/MPa, and the temperature coefficient is 0.01859 nm/°C at 25~300 °C. The fiber-optic pressure sensor has the following advantages: high fineness, high temperature tolerance, high consistency and simple demodulation, resulting in a wide application prospect in the field of high-temperature pressure testing. MDPI 2022-05-12 /pmc/articles/PMC9145377/ /pubmed/35630230 http://dx.doi.org/10.3390/mi13050763 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Suwei
Wang, Jun
Li, Wenhao
Liu, Yangyang
Li, Jiashun
Jia, Pinggang
A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
title A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
title_full A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
title_fullStr A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
title_full_unstemmed A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
title_short A MEMS-Based High-Fineness Fiber-Optic Fabry–Perot Pressure Sensor for High-Temperature Application
title_sort mems-based high-fineness fiber-optic fabry–perot pressure sensor for high-temperature application
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9145377/
https://www.ncbi.nlm.nih.gov/pubmed/35630230
http://dx.doi.org/10.3390/mi13050763
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