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Manufacturing of Complex Silicon–Carbon Structures: Exploring Si(x)C(y) Materials
This paper reports on the manufacturing of complex three-dimensional Si/C structures via a chemical vapor deposition method. The structure and properties of the grown materials were characterized using various techniques including scanning electron microscopy, aberration-corrected transmission elect...
Autores principales: | , , , , , , |
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Formato: | Online Artículo Texto |
Lenguaje: | English |
Publicado: |
MDPI
2022
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Materias: | |
Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9146070/ https://www.ncbi.nlm.nih.gov/pubmed/35629503 http://dx.doi.org/10.3390/ma15103475 |