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Manufacturing of Complex Silicon–Carbon Structures: Exploring Si(x)C(y) Materials

This paper reports on the manufacturing of complex three-dimensional Si/C structures via a chemical vapor deposition method. The structure and properties of the grown materials were characterized using various techniques including scanning electron microscopy, aberration-corrected transmission elect...

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Detalles Bibliográficos
Autores principales: Oglesby, Skyler, Ivanov, Sergei A., Londonõ-Calderon, Alejandra, Pete, Douglas, Pettes, Michael Thompson, Jones, Andrew Crandall, Chabi, Sakineh
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9146070/
https://www.ncbi.nlm.nih.gov/pubmed/35629503
http://dx.doi.org/10.3390/ma15103475