Cargando…

Growth of Highly c-Axis Oriented AlScN Films on Commercial Substrates

In this work, we present a method for growing highly c-axis oriented aluminum scandium nitride (AlScN) thin films on (100) silicon (Si), silicon dioxide (SiO(2)) and epitaxial polysilicon (poly-Si) substrates using a substrate independent approach. The presented method offers great advantages in app...

Descripción completa

Detalles Bibliográficos
Autores principales:	Su, Jingxiang, Fichtner, Simon, Ghori, Muhammad Zubair, Wolff, Niklas, Islam, Md. Redwanul, Lotnyk, Andriy, Kaden, Dirk, Niekiel, Florian, Kienle, Lorenz, Wagner, Bernhard, Lofink, Fabian
Formato:	Online Artículo Texto
Lenguaje:	English
Publicado:	MDPI 2022
Materias:	Article
Acceso en línea:	https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147036/ https://www.ncbi.nlm.nih.gov/pubmed/35630250 http://dx.doi.org/10.3390/mi13050783

Ejemplares similares

Al(1−x)Sc(x)N Thin Films at High Temperatures: Sc-Dependent Instability and Anomalous Thermal Expansion
por: Wolff, Niklas, et al.
Publicado: (2022)

In‐Grain Ferroelectric Switching in Sub‐5 nm Thin Al(0.74)Sc(0.26)N Films at 1 V
por: Schönweger, Georg, et al.
Publicado: (2023)

Laser Ultrasound Investigations of AlScN(0001) and AlScN(11-20) Thin Films Prepared by Magnetron Sputter Epitaxy on Sapphire Substrates
por: Mayer, Elena A., et al.
Publicado: (2022)

Raman Spectroscopy and Spectral Signatures of AlScN/Al(2)O(3)
por: Solonenko, Dmytro, et al.
Publicado: (2022)

Temperature Performance Study of SAW Sensors Based on AlN and AlScN
por: Wang, Hui, et al.
Publicado: (2023)

AlScN Piezoelectric MEMS Mirrors with Large Field of View for LiDAR Application
por: Liu, Yichen, et al.
Publicado: (2022)

Static High Voltage Actuation of Piezoelectric AlN and AlScN Based Scanning Micromirrors
por: Stoeckel, Chris, et al.
Publicado: (2022)

AlScN Film Based Piezoelectric Micromechanical Ultrasonic Transducer for an Extended Long-Range Detection
por: Yang, Haolin, et al.
Publicado: (2022)

Investigation of Wafer-Level Fabricated Permanent Micromagnets for MEMS
por: Bodduluri, Mani Teja, et al.
Publicado: (2022)

High Rate Deposition of Piezoelectric AlScN Films by Reactive Magnetron Sputtering from AlSc Alloy Targets on Large Area
por: Barth, Stephan, et al.
Publicado: (2022)

Low Power Compact 3D-Constructed AlScN Piezoelectric MEMS Mirrors for Various Scanning Strategies
por: Hwang, Jeong-Yeon, et al.
Publicado: (2023)

Editorial for Special Issue “Piezoelectric Aluminium Scandium Nitride (AlScN) Thin Films: Material Development and Applications in Microdevices”
por: Žukauskaitė, Agnė
Publicado: (2023)

Thin-Film-Based SAW Magnetic Field Sensors
por: Meyer, Jana Marie, et al.
Publicado: (2021)

Process Control Monitor (PCM) for Simultaneous Determination of the Piezoelectric Coefficients d(31) and d(33) of AlN and AlScN Thin Films
por: Zhang, Hao, et al.
Publicado: (2022)

Demonstration of Thin Film Bulk Acoustic Resonator Based on AlN/AlScN Composite Film with a Feasible [Formula: see text]
por: Nian, Laixia, et al.
Publicado: (2022)

What MEMS Research and Development Can Learn from a Production Environment
por: Niekiel, Malte Florian, et al.
Publicado: (2023)

Surface Modification Enabling Reproducible Cantilever Functionalization for Industrial Gas Sensors
por: Mamou, Daniel, et al.
Publicado: (2021)

Atomic structure and crystallography of joints in SnO(2) nanowire networks
por: Hrkac, Viktor, et al.
Publicado: (2019)

Local atomic arrangements and lattice distortions in layered Ge-Sb-Te crystal structures
por: Lotnyk, Andriy, et al.
Publicado: (2016)

Strongly enhanced and tunable photovoltaic effect in ferroelectric-paraelectric superlattices
por: Yun, Yeseul, et al.
Publicado: (2021)

Oriented crystallization on amorphous substrates
por: Givargizov, E I
Publicado: (1991)

Ion Beam Assisted Deposition of Thin Epitaxial GaN Films
por: Rauschenbach, Bernd, et al.
Publicado: (2017)

Structural Transitions in Ge(2)Sb(2)Te(5) Phase Change Memory Thin Films Induced by Nanosecond UV Optical Pulses
por: Behrens, Mario, et al.
Publicado: (2020)

Crystallization of Ge(2)Sb(2)Te(5) thin films by nano- and femtosecond single laser pulse irradiation
por: Sun, Xinxing, et al.
Publicado: (2016)

From Reductionism to Holism: Systems-oriented Approaches in Cancer Research
por: Kienle, Gunver, et al.
Publicado: (2012)

Exchange biased surface acoustic wave magnetic field sensors
por: Schell, Viktor, et al.
Publicado: (2023)

Crystallography at the nanoscale: planar defects in ZnO nanospikes
por: Wolff, Niklas, et al.
Publicado: (2019)

Influence of substrate orientation on tadpoles' feeding efficiency
por: Annibale, Fabiane Santana, et al.
Publicado: (2018)

Silver as Seed-Particle Material for GaAs Nanowires—Dictating Crystal Phase and Growth Direction by Substrate Orientation
por: Lindberg, Caroline, et al.
Publicado: (2016)

Potential of Commercial Wood-Based Materials as PCB Substrate
por: Immonen, Kirsi, et al.
Publicado: (2022)

Energetic Electron-Assisted Synthesis of Tailored Magnetite (Fe(3)O(4)) and Maghemite (γ−Fe(2)O(3)) Nanoparticles: Structure and Magnetic Properties
por: Dietrich, Johannes, et al.
Publicado: (2023)

Prepublication disclosure of scientific results: Norms, competition, and commercial orientation
por: Thursby, Jerry G., et al.
Publicado: (2018)

Patient-centered Diabetes Care in Children: An Integrated, Individualized, Systems-oriented, and Multidisciplinary Approach
por: Kienle, Gunver S., et al.
Publicado: (2013)

ZnAl(2)O(4) decorated Al-doped ZnO tetrapodal 3D networks: microstructure, Raman and detailed temperature dependent photoluminescence analysis
por: Rodrigues, Joana, et al.
Publicado: (2020)

Association of sickle cell disease with anthropometric indices among under-five children: evidence from 2018 Nigeria Demographic and Health Survey
por: Islam, Mohammad Redwanul, et al.
Publicado: (2021)

Influence of substrate curvature on osteoblast orientation and extracellular matrix deposition
por: Pilia, Marcello, et al.
Publicado: (2013)

Data on in vitro and in vivo cell orientation on substrates with different topographies
por: English, Andrew, et al.
Publicado: (2015)

Chiral Orientation of Skeletal Muscle Cells Requires Rigid Substrate
por: Zhu, Ninghao, et al.
Publicado: (2017)

Substrate wettability guided oriented self assembly of Janus particles
por: Banik, Meneka, et al.
Publicado: (2021)

Influence of the Components and Orientation of Hydroxyapatite Fibrous Substrates on Osteoblast Behavior
por: Tsai, Shiao-Wen, et al.
Publicado: (2022)

Cannot write session to /tmp/vufind_sessions/sess_setpnkipiv4ul4ek2qj0ddphsc