Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS

A specimen observed with a transmission electron microscope (TEM) was processed by focused ion beam (FIB) from a surface-micromachined polycrystalline silicon MEMS structure. Electron irradiation and in situ observation were performed on a selected grain boundary in the specimen. The grain boundary...

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Detalles Bibliográficos
Autores principales: Wang, Lei, Liu, Haiyun, Liu, Xing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147440/
https://www.ncbi.nlm.nih.gov/pubmed/35630210
http://dx.doi.org/10.3390/mi13050743

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147440/
https://www.ncbi.nlm.nih.gov/pubmed/35630210
http://dx.doi.org/10.3390/mi13050743

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