Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS

A specimen observed with a transmission electron microscope (TEM) was processed by focused ion beam (FIB) from a surface-micromachined polycrystalline silicon MEMS structure. Electron irradiation and in situ observation were performed on a selected grain boundary in the specimen. The grain boundary...

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Detalles Bibliográficos
Autores principales: Wang, Lei, Liu, Haiyun, Liu, Xing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147440/
https://www.ncbi.nlm.nih.gov/pubmed/35630210
http://dx.doi.org/10.3390/mi13050743
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author Wang, Lei
Liu, Haiyun
Liu, Xing
author_facet Wang, Lei
Liu, Haiyun
Liu, Xing
author_sort Wang, Lei
collection PubMed
description A specimen observed with a transmission electron microscope (TEM) was processed by focused ion beam (FIB) from a surface-micromachined polycrystalline silicon MEMS structure. Electron irradiation and in situ observation were performed on a selected grain boundary in the specimen. The grain boundary was observed and located by using lattice-oriented selective TEM photography. An evolution progress of amorphization of small silicon grain within the grain boundary and recrystallization of amorphous silicon were observed. A silicon grain turned into several smaller bar grains within the grain boundary. The mechanism of grain-boundary evolution inducing a change of conductivity of polycrystalline silicon has been revealed. The conductivity of polycrystalline silicon influenced by electron irradiation could be attributed to the change of grain boundary.
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spelling pubmed-91474402022-05-29 Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS Wang, Lei Liu, Haiyun Liu, Xing Micromachines (Basel) Article A specimen observed with a transmission electron microscope (TEM) was processed by focused ion beam (FIB) from a surface-micromachined polycrystalline silicon MEMS structure. Electron irradiation and in situ observation were performed on a selected grain boundary in the specimen. The grain boundary was observed and located by using lattice-oriented selective TEM photography. An evolution progress of amorphization of small silicon grain within the grain boundary and recrystallization of amorphous silicon were observed. A silicon grain turned into several smaller bar grains within the grain boundary. The mechanism of grain-boundary evolution inducing a change of conductivity of polycrystalline silicon has been revealed. The conductivity of polycrystalline silicon influenced by electron irradiation could be attributed to the change of grain boundary. MDPI 2022-05-08 /pmc/articles/PMC9147440/ /pubmed/35630210 http://dx.doi.org/10.3390/mi13050743 Text en © 2022 by the authors. https://creativecommons.org/licenses/by/4.0/Licensee MDPI, Basel, Switzerland. This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https://creativecommons.org/licenses/by/4.0/).
spellingShingle Article
Wang, Lei
Liu, Haiyun
Liu, Xing
Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS
title Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS
title_full Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS
title_fullStr Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS
title_full_unstemmed Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS
title_short Electron Radiation Effects of Grain-Boundary Evolution on Polycrystalline Silicon in MEMS
title_sort electron radiation effects of grain-boundary evolution on polycrystalline silicon in mems
topic Article
url https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147440/
https://www.ncbi.nlm.nih.gov/pubmed/35630210
http://dx.doi.org/10.3390/mi13050743
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AT liuhaiyun electronradiationeffectsofgrainboundaryevolutiononpolycrystallinesiliconinmems
AT liuxing electronradiationeffectsofgrainboundaryevolutiononpolycrystallinesiliconinmems

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