Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities

Recent industry trends toward more complex and interconnected systems have increased the demand for more reliable pressure sensors. By integrating a microactuator with a pressure sensor, the sensor can self-calibrate, eliminating the complexities and costs associated with traditional sensor calibrat...

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Detalles Bibliográficos
Autores principales: de Clerck, Albrey, Kang, Yuhong, Sibold, Ridge, Mouring, Scott, Ruan, Hang, Ng, Wing
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147540/
https://www.ncbi.nlm.nih.gov/pubmed/35632237
http://dx.doi.org/10.3390/s22103828

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147540/
https://www.ncbi.nlm.nih.gov/pubmed/35632237
http://dx.doi.org/10.3390/s22103828

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