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Numerical Study of the Thermal Performance of a Mems Pressure Sensor with Self-Calibration Capabilities
Recent industry trends toward more complex and interconnected systems have increased the demand for more reliable pressure sensors. By integrating a microactuator with a pressure sensor, the sensor can self-calibrate, eliminating the complexities and costs associated with traditional sensor calibrat...
| Autores principales: | , , , , , |
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| Formato: | Online Artículo Texto |
| Lenguaje: | English |
| Publicado: |
MDPI
2022
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| Materias: | |
| Acceso en línea: | https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147540/ https://www.ncbi.nlm.nih.gov/pubmed/35632237 http://dx.doi.org/10.3390/s22103828 |