Novel High Isolation and High Capacitance Ratio RF MEMS Switch: Design, Analysis and Performance Verification

In this paper, a novel high isolation and high-capacitance-ratio radio-frequency micro-electromechanical systems (RF MEMS) switch working at Ka-band is designed, fabricated, measured and analyzed. The proposed RF MEMS switch mainly consists of a MEMS metallic beam, coplanar waveguide (CPW) transmiss...

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Detalles Bibliográficos
Autores principales: Deng, Zhongliang, Wang, Yucheng, Deng, Kun, Lai, Chengqi, Zhou, Jiali
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147631/
https://www.ncbi.nlm.nih.gov/pubmed/35630113
http://dx.doi.org/10.3390/mi13050646

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147631/
https://www.ncbi.nlm.nih.gov/pubmed/35630113
http://dx.doi.org/10.3390/mi13050646

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