Array of Graphene Variable Capacitors on 100 mm Silicon Wafers for Vibration-Based Applications

Highly flexible, electrically conductive freestanding graphene membranes hold great promise for vibration-based applications. This study focuses on their integration into mainstream semiconductor manufacturing methods. We designed a two-mask lithography process that creates an array of freestanding...

Descripción completa

Detalles Bibliográficos
Autores principales: Gikunda, Millicent N., Harerimana, Ferdinand, Mangum, James M., Rahman, Sumaya, Thompson, Joshua P., Harris, Charles Thomas, Churchill, Hugh O. H., Thibado, Paul M.
Formato: Online Artículo Texto
Lenguaje:English
Publicado: MDPI 2022
Materias:
Article
Acceso en línea:https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147771/
https://www.ncbi.nlm.nih.gov/pubmed/35629859
http://dx.doi.org/10.3390/membranes12050533

Internet

https://www.ncbi.nlm.nih.gov/pmc/articles/PMC9147771/
https://www.ncbi.nlm.nih.gov/pubmed/35629859
http://dx.doi.org/10.3390/membranes12050533

Ejemplares similares